电子束偏转扫描线圈的设计与仿真

Design and simulation of electron beam deflection scanning coil

为解决电子束偏转磁场中的弱枕形畸变问题,基于余弦绕制法则,提出了改进的分布式等效余弦结构绕组。介绍了光栅畸变,采用COMSOL软件建立了分布式等效余弦结构绕组的几何模型和有限元分析模型,并对其进行数值模拟分析;分析了不同边张角的偏转磁场的分布,对比了不同半径的线圈改进前以及改进后的磁场分布,证实分布式等效余弦结构绕组的有效性,并最终确定了偏转扫描线圈的边张角和半径。

In order to improve the weak pillow distortion problem in the electron beam deflection field,an improved distributed equivalent cosine structure winding was proposed based on the cosine winding law,the grating distortion was introduced,the geometric model of the distributed equivalent cosine structure winding and the finite element analysis model were established by COMSOL software for numerical simulation,the distribution of the deflection magnetic field with different side tensor angles was analyzed,the improved magnetic field distribution of coils with different radii was compared,and the effectiveness of the distributed equivalent cosine structure winding was confirmed.The distribution of the deflected magnetic field with different side tensor angles was analyzed,and the magnetic field distribution before and after the improvement of the coil with different radii was compared,which confirms the effectiveness of the distributed equivalent cosine structure winding and finally determines the side tensor angle and radius of the deflected scanning coil.