基于磁过滤沉积技术TiAlCr基多元结构调控及性能

Preparation and Properties of TiAlCr-based Multi-component Coating by Filtered Cathode Vacuum Arc

科技发展使军用、船舶、切削等各领域的精密器件所面临的环境更加极端复杂,多元防护涂层因具有良好的综合性能而逐渐取代传统的二三元氮化物,但目前关于TiAlCr基多元涂层结构与性能的影响研究尚未报道。通过调控氮气流量(5≤F_(N)≤40 mL/min),基于磁过滤阴极真空弧(FCVA)技术制备TiAlCr基的多元(TiAlCrSi)N涂层。采用FESEM、EDS、.XRD、XPS和TEM对涂层的相结构、形貌和成分进行表征,并通过纳米压痕仪、划痕仪和电化学工作站对涂层性能进行表征。结果表明:随着氮气流量增加,涂层由无序致密的非晶相转变为具有柱状晶的(TiAlCr)N纳米晶1 SizN4非晶相的复合结构。FN≤20 mL/min时,涂层结构以均匀致密的非晶相为主;FN=20 mL/min时,涂层的结合强度Lc3(27.1 N)较高,在3.5 wt.%NaCl溶液中拥有较好的耐腐蚀性能(E_(corr)=-0.314 V,I_(corr)=2.9038μA·cm^(-2));FN≥30 mL/min时,涂层结构转变为具有柱状晶的(TiAlCr)N纳米晶/Si_(2)N_(4)非晶相复合结构,涂层的硬度得到显著提升,达到超硬级别;F_(N)=40 mL/min时,涂层拥有良好的力学性能,硬度、弹性模量、H/E和H^(3)/E^(2)分别为45.11.460.4、0.098和0.433 GPa。通过FCVA制备的(TiAlCrSi)N涂层具有优异的耐腐蚀和力学性能,可为表面防护技术在复杂苛刻环境中的发展提供参考。

Technological advances have made the environment facing precision equipment in military equipment more complex and extreme.TiAlCr-based multi-component protective coatings have gradually replaced the traditional binary and ternary nitride because of its good comprehensive properties.However,the research on the influence of multi-component coatings structure and performance have not been reported.TiAlCr-based multi-component(TiAlCrSi)N coatings are prepared based on filtered cathode vacuum arc(FCVA)technology by regulating the N2 flow rate(5≤F_(N)≤40 mL/min).FESEM,EDS,XRD,XPS,TEM,nanoindenter,scratch meter and electrochemical workstation are selected to characterized the morphology,structure,corrosion resistance and mechanical properties of the coatings,respectively.The results show that the coating is transformed from a disordered dense amorphous phase to a composite structure of columnar(TiAlCr)N nanocrystals/Si_(3)N_(4) amorphous phase with the increase of N2 flow rate.When F_(N)≤20 mL/min,the coating exhibits uniform and dense amorphous phase structure.The coating(Fv=20 mL/min)has a higher bonding strength Lc3(27.1 N),and better corrosion resistance(E_(corr)=-0.314 V,I_(corr)=2.9038μA·cm^(-2))in 3.5 wt.%NaCl solution.When F_(N)≥30 mL/min,the coating structure is transformed into a composite(TiAlCr)N nanocrystal/SisN4 amorphous phase structure with columnar crystals,and the hardness of the coating is significantly enhanced and reaches the ultra-hard level.The coatings possess good mechanical properties at Fv=40 mL/min,with hardness,modulus of elasticity,HIEandH 1E2 of 45.11,460.4,0.098 and 0.433 GPa,respectively.The(TiAlCrSi)N coatings are deposited by FCVA technology has excellent corrsion resistance and mechanical properties,which provides an important reference value for the development of surface protection technology in complex and harsh environments.