摘要
In recent years,multi-photon 3D laser printing has become a widely used tool for the fabrication of micro-and nanostructures for a large variety of applications.Typically,thorough sample characterisation is key for an efficient optimisation of the printing process.To date,three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures,that is,using ex-situ approaches.In contrast,in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures.Along these lines,we present and characterise a Fourier-domain optical coherence tomography(FD-OCT)system that can be readily integrated into an existing 3D laser lithography setup.We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist.In such samples,local reflectivity arises from the(refractive-index)contrasts between the polymerised and non-polymerised regions.Thus,the refractive index of the printed material can be extracted.Furthermore,we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing.Supported by transfer-matrix calculations,we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix.Finally,we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.
基金
This work was funded by the Deutsche Forschungsgemeinschaft(DFG,German Research Foundation)under Germany’s Excellence Strategy 2082/1-390761711(Excellence Cluster“3D Matter Made to Order”).
