摘要
Atomic layer infiltration technology allows the formation of a nanometer-thick polymer-inorganic hybrid barrier layer in polymer material for flexible organic light-emitting diode(OLED)displays.In this study,according to transmission electron microscopy and secondary-ion mass spectrometry analysis results under various process conditions,a compact polymer-inorganic hybrid nanolayer was successfully formed in a polymer and good barrier performance was revealed with a low water vapor transmission rate under optimal process conditions.Additionally,through gas chromatography-mass spectrometry measurements after ultra-violet radiation testing,polymer out-gassing decreased compared to bare polymers.Based on barrier properties,the polymer with a polymer-inorganic hybrid barrier nanolayer was applied to a flexible OLED display as a substrate.During storage tests and folding tests,the flexible OLED display exhibits good reliability and better flexibility compared to those with an inorganic barrier layer.These results confirm that the polymer-inorganic hybrid nanolayer is suitable for barrier layer formation in flexible OLED displays.
