摘要
介绍了测量系统中双频激光干涉仪的测量原理。针对测量系统精度要求高的特点,深入分析了环境及安装因素对测量结果的影响,尤其是激光波长、镜面面形、数据延迟、反射镜安装非正交等4种干涉仪非结构性误差,研究各种误差对测量结果的影响,并给出相应的误差补偿方法。结果表明,这些补偿方法有效地消除了环境及安装误差对整个测量系统的影响。
The measurement principle of dual-frequency laser interferometer in measurement system is introduced in this paper. In view of high accuracy requirement of measurement system,the influence of environment and installation factors on the measurement results is analyzed in depth,especially laser wavelength,mirror surface shape,data delay and nonorthogonality of mirrors assembling. The influence of various errors on the measurement results is studied, and the corresponding error compensation method is given. The results show that these compensation methods eliminate effectively the influence of environment and installation errors on the whole measurement system.
作者
付纯鹤
连军莉
崔莉
FU Chunhe;LIAN Junli;CUI Li(The 45^(th) Research Institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2022年第6期53-57,共5页
Equipment for Electronic Products Manufacturing
关键词
激光干涉测量
非结构性误差分析
误差补偿
Laser interferometry
Non-structural error analysis
Error compensation
