摘要
对金属氧化物基气体传感器在气体检测领域的优劣势进行了简单阐述,主要介绍了SnO_(2)气体传感器感知机理,归纳总结了传感器气体选择性改善方向,并对国内外研究中算法优化、掺杂贵金属、形貌构造、杂化材料、复合过滤涂层、外置过滤器等方法对于SnO_(2)气体传感器选择性提升的影响进行了评述,系统介绍了近年来SnO_(2)气体传感器在选择性改善领域的研究进展。最后,对SnO_(2)气体传感器的选择性评价标准、技术现状等应用问题进行了阐述分析,并提出该领域的研究应向着阵列式、多功能化、新材料与新工艺技术融合以及软硬件一体智能化方向发展。
The advantages and disadvantages of metal oxide-based gas sensors in the field of gas detection are briefly expounded.The sensing mechanism of SnO_(2) gas sensors is mainly introduced,and the improvement direction of sensor gas selectivity is summarized.The effects of algorithm optimization,doping noble metal,constructing morphology structure,hybrid material,composite filter coating,mounting external filter and other methods in domestic and foreign researches on the selectivity enhancement of SnO_(2) gas senors are reviewed.The research progresses of SnO_(2) gas sensors in the field of selectivity improvement in recent years are systematically introduced.Finally,selectivity evaluation standard,technology status and other application pro-blems of SnO_(2) gas sensors are expounded and analyzed.It is proposed that the research in the filed should develop towards array-type,multi-function,combination of new material and new process,and intelligent integration of hardware and software.
作者
张清
Zhang Qing(CCTEG Changzhou Research Institute,Changzhou 213000,China;Tiandi(Changzhou)Automation Co.,Ltd.,Changzhou 213000,China)
出处
《微纳电子技术》
CAS
北大核心
2022年第12期1263-1270,共8页
Micronanoelectronic Technology
基金
天地科技股份有限公司国际科技合作项目(2021-2-GH003)。