精馏技术在电子化学品制备中的应用进展

Application progress of distillation technology in preparation of electronic grade chemicals

综述了连续精馏、间歇精馏、亚沸精馏、加减压精馏、共沸精馏、萃取精馏、反应精馏、低温精馏等多种精馏技术在电子化学品制备中的应用现状,并对精馏技术在电子化学品制备过程的应用前景做出了展望。

The application situation of continuous distillation, batch distillation, sub boiling distillation, pressure and vacuum distillation, azeotropic distillation, extractive distillation, reactive distillation, cryogenic distillation and other distillation technologies in the preparation of electronic chemicals are reviewed, and the application prospect of distillation technologies in the preparation of electronic chemicals is forecasted.