HIGH RESOLUTION,REAL-TIME LINE-FIELD FOURIER-DOMAIN INTERFEROMETRY

To increase the application potential in manufacturing process,such as monitoring the processing performance,the profile measurement should be provided in real-time display and with high resolution simultaneously.We propose a line-field Fourier-domain interferometric method(LFI),which combines the line-field microscope with spectral interferometer,for the surface cross-sectional profile measurement with no scan needed.The white light and objectives are employed to offer high axial and lateral resolution,respectively.In our system setup,the measurement could be implemented in real-time display of 10 frame/s,and the resolutions of the LFI system in X;Y,and Z directions are~8μm,~3.2μm,and~1.4μm,respectively.As a demonstration,the cross-sectional profiles of a microfluidic chip are tested.The graphics processing unit is also used to accelerate the reconstruction algorithm to achieve the real-time display of the cross-sectional profiles.