光学元件亚表面缺陷表征与检测技术研究现状分析(特邀)

Research status analysis of subsurface damage characterization and measurement technology of optical components(invited)

光学元件常用脆性材料作为原材料,脆性材料加工过程中极易引入亚表面缺陷,亚表面缺陷对脆性材料的制造阶段和应用阶段均存在严重的危害。制造方面,亚表面缺陷影响工序的选择与衔接,易产生过加工、欠加工等问题,导致加工效率低下;应用方面,亚表面缺陷影响光学元件的成像质量、稳定性、使用寿命等关键技术参数。为了高效率、高质量地去除亚表面缺陷,全面表征和准确检测光学元件的亚表面缺陷至关重要。文中首先介绍了不同加工方式对应的亚表面缺陷形成机理与亚表面缺陷的表征方法研究现状;其次归纳总结了破坏性与非破坏性的亚表面缺陷检测方法,分别介绍了不同检测方法的原理、适用材料与加工阶段、优点与不足之处;并介绍了基于表面粗糙度、加工参数的亚表面缺陷预测方法;最后,对亚表面缺陷检测技术的发展趋势进行了展望。

Brittle materials are usually used as raw materials for optical elements.Subsurface damage(SSD)is easily generated during the processing of brittle materials.SSD causes serious hazard to the manufacturing and application stage of brittle materials.In terms of manufacturing,SSD affects the selection and connection of processes,which is easy to cause problems such as excessive processing and lack of processing,and resulting in low processing efficiency.In terms of application,SSD affects key technical indicators such as imaging quality,stability,and service life of optical components.Comprehensive characterization and accurate measurement of SSD in optical components is critical for efficient,and high-quality removal of SSD.In this paper,the formation mechanism of SSD corresponding to different processing methods and the characterization methods of SSD are introduced firstly.Then the destructive and non-destructive SSD measurement methods are summarized.The principles,applicable materials,applicable processing stages,advantages and disadvantages of different measurement methods are introduced,respectively.The SSD prediction methods based on surface roughness and processing parameters are presented.Finally,the development trend of SSD measurement technology is prospected.