三自由度差动式微位移放大运动平台设计

Design and simulation of differential micro-displacement amplification platform with three degrees of freedom

根据杠杆微位移放大机构、桥式微位移放大机构和差动式微位移放大机构的设计原则,设计了一种由压电陶瓷驱动的平面三自由度微位移并联式柔性定位平台,画出微位移定位平台机构的运动简图,并通过理论计算得到输出位移解析结果。对微位移定位平台进行有限元分析,得到其位移特性,对比理论计算解析结果,验证了理论分析和仿真分析结果的一致性,最后对定位平台运动精度进行了分析及改进设计。

The design principles of lever micro displacement amplification mechanism,bridge micro displacement amplification mechanism and differential micro displacement amplification mechanism are described.A three degree of freedom parallel flexible positioning platform driven by piezoelectric ceramics is designed.The kinematic model of the positioning platform is established by using the pseudo rigid body model method.The analytical results are calculated,and the displacement characteristics of the positioning platform are obtained by finite element analysis.The feasibility of the scheme is proved by the comparison between the kinematic model analysis results and the finite element simulation results.The improvement way of the motion accuracy of the positioning platform is stated.