乙酰丙酮基1,2-双(二苯基膦)乙烷镍的合成、热性质及其作为化学气相沉积前驱体的应用研究

Synthesis and Thermal Properties of an Acetylactonate 1,2-bis-(diphenylphosphino)-ethane Nickel and its Applicability as a CVD Precursor

本文以乙酰丙酮镍和1,2-双(二苯基膦)乙烷为原料合成了乙酰丙酮基1,2-双(二苯基膦)乙烷镍配合物,通过元素分析、熔点以及热重分析仪对所合成配合物的化学成分、挥发性、热稳定性以及运输行为进行了测定分析。此外,以该化合物为前驱体,通过薄膜沉积实验对其作为CVD前驱体的应用性进行了评价,并对所沉积薄膜的形貌、化学组成及晶型结构进行了研究。研究结果表明所制备的薄膜成分为NiO,成膜连续均匀,具有较高的纯度,说明其具有作为CVD前驱体应用于制备镍基薄膜的可行性。

In this work,the nickel acetylacetonate 1,2-bis-(diphenylphosphino)ethane complex was synthesized using nickel acetylacetonate and 1,2-bis-(diphenylphosphino)ethane as raw materials.The chemical composition,volatility,thermal stability,and transport behavior of the synthesized complex were determined and analyzed by elemental analysis,melting point,and thermogravimetric analysis.The applicability of the synthesized complex as a CVD precursor was evaluated through deposition experiments,and the morphology,chemical composition,and crystal structure of the deposited films were studied.The results demonstrated that the composition of the prepared film is NiO,and the film is continuous,uniform,and high purity.Obviously,all these results demonstrated that the synthesized complex has the feasibility of being used as a CVD precursor to prepare Ni-based films.