关于半导体行业气体监控系统研究

Study on Gas Monitoring System in Semiconductor Industry

半导体工厂使用多样之特殊气体,特殊有:腐蚀性、氧化性、易燃性、自燃性、毒性、窒息性,这样的气体如果发生泄漏而我们毫无察觉,是一件非常危险的事情;因此为维护厂内人员安全、环境保护、公司财产、需要设置完善的气体侦测系统,以防患未然,气体监控系统作为半导体工厂内最重要的生命安全系统,是最重要的FAB安全基石,但是侦测只是探测手段,不泄漏才是本质安全,重视侦测系统的同时,还要加强本质安全管理。

A variety of special gases are used in semiconductor factories, including corrosivity, oxidation, flammability, spontaneous combustion, toxicity and suffocation. If such gases leak without our awareness, it is a very dangerous thing. Therefore, in order to maintain the safety of personnel in the plant, environmental protection and company property, it is necessary to set up a complete gas detection system to prevent accidents. As the most important life safety system in the semiconductor plant, the gas monitoring system is the most important cornerstone of FAB safety, but detection is only a detection method, and no leakage is essential safety. While paying attention to the detection system, it is also necessary to strengthen the intrinsic safety management.