脉冲驱动氩气真空介质阻挡放电的光谱特性研究

Study on Spectral Characteristics of Pulsed Argon Vacuum Dielectric Barrier Discharge

通过自主设计正极性Marx纳秒脉冲电源,在不同放电频率、不同电源电压幅值下,采用发射光谱在真空环境下对氩气放电时的电子激发温度和电子密度进行测量计算。通过双谱线法选取合适的Ar原子谱线,求得电子激发温度在1550~3400 K之间,在正极性脉冲电源做电压源,且电源电压一定时,电子激发温度随着电源频率的升高而呈现上升趋势,在电源频率一定时,电子激发温度也随着电源电压的增加而升高。依据Stark展宽原理对真空体积介质阻挡放电时的电子密度进行了测量计算。电子密度的数量级可达10^(13)m^(-3),当电源电压不变时,电子密度随电源频率的增加呈现上升趋势,当电源频率不变,电子密度随着电源电压的升高也逐渐提升。

The positive polarity Marx nanosecond pulse power supply was designed independently.The electron excitation temperature and electron density of argon discharge in a vacuum were measured and calculated by emission spectroscopy under different discharge frequencies and voltage amplitudes.Through the double line method to choose the appropriate Ar atomic spectrum,electron excitation temperature between 1550~3400 K in the regular polarity pulse power voltage source,and under a specific voltage,electron excitation temperature with the increase of power frequency and rise,in power frequency,electron excitation temperature increase with the increase of the supply voltage as well.The electron density in vacuum volumetric dielectric barrier discharge is measured and calculated according to the Stark broadening principle.The order of magnitude of electron density can reach 10^(13)m^(-3).When the power supply voltage is constant,the electron density shows a rising trend with the increase in voltage frequency.When the power supply frequency is constant,the electron density also gradually increases with the increase of power supply voltage.