高端光学元件超精密加工技术与装备发展研究

Ultra-Precision Machining Technology and Equipment for High-End Optical Elements

高端光学元件是决定高端装备性能水平的核心零件,研究高端光学元件超精密加工技术与装备发展,对于实施制造强国战略、满足高端装备产业需求具有积极意义。本文剖析了光学元件超精密加工方法与装备、高性能基础部件、超精密光学加工中的测量方法与装备等的发展情况,凝练了精度与尺寸极端化、形状与性能一体化、加工工艺复合化、加工与检测一体化、装备与工艺智能化等发展趋势。通过广泛的行业调研和研讨,从需求、目标、产品、关键技术、应用示范、支撑保障等方面着手,形成了面向2035年我国高端光学元件超精密制造技术路线图。针对性提出了优化创新体系设置、组织优势资源成立技术联盟,加大资源保障力度、布局基础研究和技术攻关计划,加强人才培育、构建梯队并扩大队伍规模,筑牢产业发展基础、培育龙头企业和专精特新“小巨人”企业等发展建议,以期促进高端光学元件加工产业提升与高质量发展。

High-end optical elements determine the performance of high-end equipment.Researching the ultra-precision machining technology and equipment for high-end optical elements is crucial for strengthening China’s manufacturing industry and satisfying the requirements of the high-end equipment industry.In this study,the ultra-precision machining methods and equipment for optical elements,high-performance basic components,and measurement methods and equipment used in ultra-precision optical machining are analyzed.Five development trends are summarized including extremalization of precision and size,integration of shape and performance,compounding of machining technologies,integration of machining and measurement,and intellectualization of equipment and processes.Through extensive survey and discussions,a technology roadmap for ultra-precision manufacturing of high-end optical elements by 2035 is proposed from the aspects of demand,goals,products,key technologies,application demonstrations,and guarantees.Furthermore,several development suggestions are proposed,including(1)optimizing the innovation system and establishing technical alliances by organizing superior resources,(2)increasing resource guarantees and laying out plans on basic and technical research,(3)strengthening talent cultivation to expand the scale of the multi-level talent team,and(4)building a solid foundation for industrial development and cultivating small-sized leading enterprises.