能量耦合模型的飞秒激光烧蚀面齿轮形貌研究

Research on surface gear topography of femtosecond laser ablation based on energy coupling model

飞秒激光精微加工面齿轮材料18Cr2Ni4WA是去除材料的先进制造方法。本文依据烧蚀凹坑的深度与宽度和激光能量密度的关系得到材料的烧蚀阈值和影响重叠率的因素。考虑齿轮材料成分间互温感应效应与多脉冲激光累积效应,建立材料的能量复耦合模型。通过改变激光能量密度和脉冲数,研究飞秒激光烧蚀凹坑及齿面形貌表面的变化规律,得出脉冲数对烧蚀效果影响小,激光能量密度为1.730 J/cm2激光功率为1.9 W脉冲数N=3000进行烧蚀效果最好可得到最优的实际烧蚀面深度为17.604μm。

Femtosecond laser micro-machining of face gear material 18Cr2Ni4WA is an advanced manufacturing method for removing materials. In this paper, according to the relationship between the depth and width of ablation pits and laser energy density, the ablation threshold of materials and the factors affecting the overlap ratio are obtained. Considering the inter-temperature induction effect between gear material components and the accumulation effect of multi-pulse laser, the energy complex coupling model of the material is established. By changing the laser energy density and the number of pulses, the change rule of femtosecond laser ablation pits and tooth surface topography is studied. It is concluded that the number of pulses has little effect on the ablation effect, and the laser energy density is 1.730 J/cm~2,the laser power is 1.9 W,the pulse number N=3000,and the best ablation effect can be obtained, and the optimal actual ablation surface depth is 17.604 μm.