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基于浮动源的氮化镓器件导通电阻测试技术研究

Research on the RDSON Test Technology of GaN Devices Based on Floating Source
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摘要 首先,介绍了氮化镓器件的基本特征,以一款氮化镓功率器件为例,介绍了其基本结构、应用场景和关键参数,并研究了其导通电阻的测试;其次,介绍了浮动源的特点,研究了使用浮动源测试氮化镓器件导通电阻的方法,在测试方案的软件、硬件设计上提出了一些建议;然后,将所提出的测试方案运用于实际测试,结果表明,得到的测试数据与理论值吻合地较好,证明了测试方案的有效性;最后,对测试过程中常见的问题进行了分析,对于提高氮化镓器件导通电阻测试精度具有一定的参考价值。 Firstly,the basic characteristics of GaN devices are introduced.Taking a GaN power device as an example,the basic structure,application scenarios and key parameters are introduced,and the test method of its RDSON is studied.Secondly,the characteristics of the floating source are introduced,the method of using the flating source to test the RDSON of GaN devices is studied,and some suggestions on the software and hardware design of the test scheme are put forward.Then,the proposed test method is applied to the actual test,and the results show that the obtained test data coincides with the theoretical value,which proves the effectiveness of the test scheme.Finally,the common problems in the process are analyzed,which has some reference value for improving the test accuracy of the RDSON of GaN.
作者 张鹏辉 王建超 ZHANG Penghui;WANG Jianchao(China Key System&Integrated Circuit Co.,Ltd.,Wuxi 214000,China)
出处 《电子质量》 2022年第11期12-16,共5页 Electronics Quality
关键词 半导体测试 氮化镓器件 导通电阻 浮动源 semiconductor testing GaN devices RDSON floating source
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