高过载小量程加速度计结构优化与特性分析

Structural optimization and characteristic analysis of small range accelerometer with high overload

在四边固支梁—质量块结构的基础上,优化设计了一种带有微梁的新型四边固支梁压阻式加速度计敏感芯片。通过在结构中引入微梁,有效解决了传统小量程加速度计固有频率与灵敏度相互制约的问题。利用有限元分析软件对优化后的结构进行分析,得到结构的最大应力为2.6 MPa,固有频率为31 kHz,灵敏度为60.9μV/gn,抗过载为10000 gn。与传统高过载小量程加速度计相比较,有效地提高了加速度计的综合性能。

Based on the structure of quad-side fixed beam and proof mass,a new type of quad-side fixed beam piezoresistive accelerometer sensing chip with micro beam is optimized and designed.By introducing microbeam into the structure,the problem of mutual restriction between natural frequency and sensitivity of traditional small range accelerometer is effectively solved.The optimized structure is analyzed by finite element analysis software,and the obtained maximum stress of the optimized structure is 2.6 MPa,the natural frequency is 31 kHz,the sensitivity is 60.9μV/gn,and the resistance to overload is 10000 gn.Compared with the traditional accelerometer with high overload and small range,the comprehensive performance of the accelerometer is effectively improved.