压电式MEMS驱动器的稳健设计研究

Study on robust design of piezoelectric MEMS driver

微机电系统(MEMS)驱动器由于其尺寸特性和工艺特点,微小的变差也会对其整体性能的稳定性产生较大影响。将稳健设计理论与方法引入到微驱动器的设计中具有重要的意义。以一种压电式MEMS驱动器为例,分析其结构及原理,对其进行随机模型的稳健设计。通过开发相应算法程序得到稳健设计解。对比原始设计与稳健设计的结果,验证当设计变量及噪声因素存在变差时,稳健设计结果仍可以保持该驱动器的质量稳定性。

Because of its size and process characteristics,small variation of MEMS driver will also have a great impact on stability of its overall performance.It is of great significance to introduce robust design theory and method into the design of microdrive.Taking a piezoelectric MEMS actuator as an example,its structure and principle are analyzed,and robust design of random model is made.The robust design solution is obtained by developing the corresponding algorithm program.Compared with the results of the original design and the robust design,it is verified that the robust design results can still maintain the quality stability of the driver when the design variables and noise factors exist variation.