1[1]ANSI/ESD S20.20 1999 "Protection of Electrical and Electronic Parts, Assemblies and Equipment", ESD Association, 7900 Turin Road, Rome NY 13440 USA, www. esda. org
2[2]International Technology Roadmap for Semiconductors 2003 Edition,International SEMATECH, 2706 MontopolisDrive, Austin TX 78741 USA, www. sematech.org
3[3]E78-1102 "Guide to Assessing and Controlling Electrostatic Discharge (ESD)and Electrostatic Attraction (ESA) in Semiconductor Equipment", Semiconductor Equipment and Materials International (SEMI), 3081 Zanker Road, San Jose, CA 95134USA, www. semi. org.
4[4]E129-1103 "Guide to Controlling Electrostatic Charge in a Semiconductor Manufacturing Facility", SEMI, www. semi. org
