一种稀碱水显影的紫外负性光刻胶

A Kind of Negative UV Photoresist Developable in Dilute Aqueous Base

以改性聚乙烯醇为成膜树脂,制备了一种稀碱水显影的紫外负性光刻胶。将不饱和脂肪酸酐与聚乙烯醇进行酯化反应得到部分酯化的产物,将其与双叠氮化合物BAC-M一起溶于有机溶剂中,制成负性光刻胶。其成像原理与环化橡胶-双叠氮负胶类似,主要是通过曝光区叠氮基团的光解产物-氮卡宾与聚乙烯醇酯化物发生交联反应,曝光后不需后烘过程就可以实现显影成像。与环化橡胶体系用二甲苯类有机溶剂显影相比,该体系实现了稀碱水显影,曝光成像实验表明,该体系在分辨率、光敏性和耐湿法蚀刻方面表现出良好的性能。

In this paper, a UV negative photoresist developed with dilute alkaline water was prepared by using the modified polyvinyl alcohol as the film-forming resin. The unsaturated fatty acid anhydride and polyvinyl alcohol are subjected to esterification reaction to obtain a partially esterified product, which is dissolved in an organic solvent together with the bisazide compound BAC-M to prepare a negative photoresist. Its imaging principle is similar to that of cyclized rubber-bisazide negative adhesive, mainly through the cross-linking reaction of nitrogen carbene and polyvinyl alcohol ester, the photolysis product of azide group in the exposure area, without post-baking process after exposure. Development imaging can be achieved. Compared with the development of the cyclized rubber system with xylene-based organic solvents,the system achieved dilute alkaline water development, and exposure imaging experiments showed that the system showed good performance in terms of resolution, photosensitivity and wet etching resistant.