上海同步辐射光源纳米三维成像线站设计、研发及调试

Design, Development and Commissioning of 3D Nano Image Beamline at Shanghai Synchrotron Radiation Facility

全场透射X射线显微镜(TXM)具有纳米量级空间分辨、原位、无损和三维(3D)成像等优点,目前已被广泛应用到多个研究领域中。纳米三维成像线站是上海同步辐射光源(SSRF)二期工程建设内容之一,该线站瞄准前沿领域中的科学问题和国家战略需求,主要实验方法为TXM和纳米计算机断层扫描(CT),能量范围为5~14 keV,空间分辨率的设计指标为20 nm。该线站基于弯铁光源,光束线采用柱面准直镜、双晶单色器和超环面聚焦镜设计方案。实验线站采用自主设计、整体集成的全场TXM系统,实验站中单毛细管聚焦元件、TXM机械系统、纳米CT控制及数据采集软件均为自主研发。2021年SSRF纳米三维成像线站(BL18B)完成了带光调试与性能测试,实现了20 nm分辨率的TXM成像,是国际上首条基于弯铁光源并实现20 nm分辨率成像的光束线站,测试结果全部达到线站设计指标,2022年该线站将对用户开放使用。

Full-field transmission X-ray microscope(TXM) has been widely applied in many research fields owing to its various strengths, such as in-suit non-destructive three-dimensional(3D) imaging with a nanoscale spatial resolution. 3D nano image beamline, a part of the Shanghai Synchrotron Radiation Facility(SSRF) phase-II project, focuses on cuttingedge scientific problems and national strategic needs. The main experimental methods are TXM and nano-computed tomography(nano-CT), and the energy range is 5-14 keV. The design goal for spatial resolution is 20 nm. Based on a bending magnet source, the beamline is built with a cylindrical collimating mirror, a double crystal monochromator, and a toroidal condenser. The experimental endstation adopts a self-designed and integrated full-field TXM system, and the mono-capillary condenser, the TXM mechanical system, and the nano-CT control and data acquisition software of the experimental endstation are all developed independently. The commissioning and performance tests of the SSRF 3D nano image beamline(BL18B) have been completed in 2021, with a resolution of 20 nm achieved for TXM imaging. This beamline is the first TXM beamline based on a bending magnet source in the world with a 20 nm imaging resolution. All the test results have reached the design goals for this beamline, and it will open to users in 2022.