基于多桥路隧道磁阻效应的双轴微加速度计

Biaxial Micro-accelerometer Based on Multi-bridge Tunneling Magneto-resistance Effect

论文利用隧道磁阻效应设计了一种高分辨率的双轴微机械加速度计。该加速度计基于正交回折形线圈产生的高变化率磁场实现对x、y方向输入加速度的独立检测;其次阐述提出的新型多桥路隧道磁阻结构,通过理论仿真计算验证该新型桥路结构不但可抑制静态磁场的干扰,且具有更明显的差分放大作用;最后,通过有限元仿真及相关参数计算,验证了加速度计工作的可行性,并证明该加速度计具有较高灵敏度及抗干扰能力。

This paper designs a high-resolution biaxial micro-accelerometer based on multi-bridge tunneling magneto-resistance effect. The accelerometer independently detects the input acceleration in x and y directions based on the high gradient magnetic field generated by the orthogonal folded coils. Then the new multi-bridge tunnel magneto-resistive structure proposed is described in this paper,it is proved by theoretical simulation that the new bridge structure can not only restrain the interference of static magnetic field,but also has obvious differential amplification. Finally,the feasibility of the accelerometer is verified by finite element simulation and relevant parameter calculation,and it is proved that the accelerometer has high sensitivity and anti-interference ability.