基于迭代学习的压力传感器温度补偿方法

Temperature Compensation Method of Pressure Sensor Based on Iterative Learning

硅压阻式压力传感器测量精度高、响应速度快,广泛应用于轨道交通、航空航天、石油石化等领域,然而受半导体温度特性的影响,其存在温度漂移现象。为有效抑制温度漂移对压力传感器输出精度的影响,提出一种基于迭代学习的压力传感器温度补偿方法。根据硅压阻式压力传感器的工作原理建立其数学模型,确定了基于环境温度和输入压力的迭代学习补偿策略,并对所提方法进行收敛性分析。仿真试验表明,利用所提补偿方法能够将压力传感器零点漂移误差的均方根值由7.31 kPa降至0.75 kPa,可提升硅压阻式压力传感器对环境温度变化的适应能力,增强其在恶劣工况条件下的稳定性和可靠性。

Silicon piezoresistive pressure sensors are widely used in rail transit,aerospace,petroleum and petrochemical fields due to their high measurement accuracy and fast response speed.However,due to the temperature characteristics of semiconductors,there is a serious temperature drift phenomenon.In order to effectively suppress the influence of temperature drift on the output accuracy of pressure sensor,a temperature compensation method of pressure sensor based on iterative learning is proposed.According to the working principle of silicon piezoresistive pressure sensor,its mathematical model is established,the iterative learning compensation strategy based on ambient temperature and input pressure is determined,and the convergence of the proposed method is analyzed.The simulation results show that the root mean square value of the zero drift error of the pressure sensor can be reduced from 7.31 kPa to 0.75 kPa by using the proposed compensation method,which can improve the adaptability of the silicon piezoresistive pressure sensor to environmental temperature changes,and enhance its stability and reliability under harsh working conditions.