Polarization independent high-speed spatial modulators based on an electro-optic polymer and silicon hybrid metasurface

Dynamical control of the constitutive properties of a light beam is important for many applications in photonics and is achieved with spatial light modulators(SLMs).Performances of the current demonstrations,such as liquidcrystal or micro-electrical mechanical SLMs,are typically limited by low(kHz)switching speeds.Here,we report a high-speed SLM based on the electro-optic(EO)polymer and silicon hybrid metasurface.The specially configured metasurface can not only support a high-Q resonance and large“optical–electrical”overlap factor,but also overcome the challenge of polarization dependence in traditional EO modulators.Combined with the high EO coefficient of the polymer,a 400 MHz modulation with an RF driving source of 15 dBm has been observed in the proof-of-concept device near the wavelength of 1310 nm.The device with the desired merits of high speed,high efficiency,and micrometer size may provide new opportunities for high-speed smart-pixel imaging,freespace communication,and more.