Suppression Strategy of Micro-waviness error in Ultra-precision Parallel Grinding

Ultra-precision parallel grinding is widely used in the machining of complex optic components with high tolerance and excellent surface finish.However,the micro-waviness raised from the relative motion error of the grinding tool is frequently involved in the grinding process despite the fine dressing and dynamic balance work carried out,which posed a remarkable impact on the surface quality and form accuracy.Therefore,it is essential to investigate the evolution mechanism of the micro-waviness error and determine a relevant strategy to suppress this kind of error.In this paper,a model of the distribution of grinding points corresponding to the relative motion error of the grinding wheel is developed by considering the phase effect.A close relationship is found between the micro-waviness geometry and the distribution of grinding points.This indicates that the phase shift is a significant parameter to determine the waviness pattern,and the uniform distribution of grinding points is beneficial to suppress the micro-waviness in parallel grinding.Finally,an error-suppression strategy is proposed by adjusting the wheel speed to maintain an appropriate phase shift to suppress the micro-waviness error.This work provides a new method to control the micro-waviness and reduce the effect of the waviness error on the surface generation.