半导体设备运动控制系统接口设计

Design of Motion Control Interface for Semiconductor Equipment

在多自由度纳米级运动平台的运动控制系统架构中,运动控制器和电机驱动器之间增加了运动控制系统接口的设计,用于实现光纤接口和模拟量控制接口的转换,从而完成运动平台的驱动控制。运动控制系统接口的设计主要针对光纤接口的运动控制器及常用的模拟量控制伺服或线性驱动器,适用性强。主要描述了运动控制系统接口的功能与构成、硬件设计、现场可编程逻辑门阵列(FPGA)程序设计。

In the motion control system architecture of the multi degree of freedom nano-level motion platform,the motion control system interface is added between the motion controller and the motor driver,which is used to realize the conversion of optical fiber interface and analog control interface,thus completing the drive control of the motion platform. The design of the motion control system interface is mainly aimed at the motion controller with optical fiber and commonly used analog control servo or linear driver, with strong applicability. This paper mainly describes the function and composition,hardware design,FPGA(Field Programmable Gate Array) program design of the motion control system interface.