半导体设备工艺配方管理系统研究

Research on Recipe Management System of Semiconductor Equipment

半导体设备工艺配方(以下简称配方),是指半导体设备工作状态下各种工艺参数的组合,其准确与否直接影响到半导体器件的质量。随着半导体设备自动化需求的不断提高,为减少人为误差,主机端需要严格把控设备端的配方内容,对设备端的配方管理提出了较高的要求。基于主机端与设备端的配方交互需求,对其交互方式进行了阐述,介绍了主机端临时修改配方参数的方法,以便在机台端配置少量配方即可实现多种产品生产,为设备端配方相关的功能开发提供参考依据。

The accuracy of recipe,referring to the combination of various process parameters under the working state of semiconductor equipment,affects the quality of semiconductor products directly. With the continuous improvement of semiconductor equipment automation requirements,in order to reduce human error,the host needs to control recipe of equipment strictly,which puts forward higher requirements for the recipe management of equipment. Based on the recipe interaction requirements of host and equipment,the interaction mode is described,and the method of temporarily modifying the recipe parameters at host is introduced,so that the production of multiple products can be realized by configuring a small amount of recipe at equipment,providing a reference basis for the function development related to the recipe at equipment.