四象限传感器在高精度物料传输系统中的定位应用

The Locating Application of Four-quadrant Detector in High-precision Material Transfer System

基于四象限光电传感器技术,针对大型半导体物料传输设备的高精度定位需求,设计了一套高精度定位和补偿系统。经过验证,这种基于四象限传感器的定位方法可有效应用于高精度物料传输系统,进行定位并且进行位置补偿后完成物料准确定位传输。

Based on four quadrant detector,in the view of the need of high precision location for large semiconductor material transmission equipment,a high precision location and compensation system is designed. After verification,this locating method based on four quadrant detector can be used effectively in the high precision of large semiconductor material transmission system,location and compensation of position is done make the material location and transmission is completed.