摘要
为满足多自由度精密运动控制台的性能需求,研究了运动台控制软件与控制板卡之间的通信,提出一种基于模型开发的嵌入式通信策略。实验证明,该策略能够准确、稳定地传输数据,并且在代码开发效率与传输数据标准化两个方面具有优势。目前,该策略应用于某型号半导体制造设备,提高了设备的调试效率,具有较高的工程价值。
In order to meet the performance requirements of the multi-DOF precision motion console,the communication between the motion console control software and the control board are studied in this paper,and based on model development,an embedded communication strategy is proposed. The experiment results show that the strategy can transmit data accurately and steadily,and with two advantages in code development efficiency and transmission data standardization. At present,the strategy is applied to a certain type of integrated circuit manufacturing equipment,which improves the debugging efficiency of the equipment and providing high engineering value.
作者
吕妍淼
陈国兴
杨际腾
LÜ Yanmiao;CHEN Guoxing;YANG Jiteng(The 45^(th) Research Institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2023年第1期65-70,共6页
Equipment for Electronic Products Manufacturing
关键词
半导体制造设备
精密运动控制
嵌入式通信
Semiconductor manufacturing equipment
Precision motion control
Embedded communication