摘要
为优化整面式涂布工艺,提高光刻胶材料利用率,减小曝光显影面积,设计基于“IPC+TwinCAT 3”平台的巡边框胶涂布控制系统。搭建“IPC+TwinCAT 3”控制系统硬件平台,运用经典控制策略,实现9轴精密运动,运用视觉检测,实现了巡边框胶涂布和偏差测量。以IPLUI为平台,设计等级权限的人机交互,最后完成了小批量涂布试验。结果表明:该系统运行稳定,框胶膜厚处于0.6~2μm标准范围,优化后材料利用率高于97%,提高了框胶涂布的自动化水平。
A patrol frame glue coating control system based on“IPC+TwinCAT 3”platform was designed to optimize the entire surface coating process,improve the utilization rate of photoresist materials and reduce the exposure and development area.The hardware platform was designed based on the“IPC+TwinCAT 3”control system.Classic control strategies was used to achieve the 9-axis precision motion,vision test was used to realize the patrol frame glue coating and deviation measurement.IPLUI was used as a platform to design the human-computer interaction with hierarchical authority.Finally,the coating test of small batch specifications was completed.The results show that the system runs stably,the thickness of the frame glue reaches the standard range of 0.6μm to 2μm,and the material utilization rate exceeds 97%.The system improves the automation level of the frame glue coating.
作者
章周伟
廖映华
胡飞
ZHANG Zhouwei;LIAO Yinghua;HU Fei(Faculty of Mechanical Engineering,Sichuan University of Science&Engineering,Yibin Sichuan 644000,China;Yibin Engineering Research Center of Intelligent Terminal and Digital Manufacturing,Yibin Sichuan 644000,China;Faculty of Mechanical Engineering,Sichuan Vocational College of Chemical Technology,Luzhou Sichuan 646300,China)
出处
《机床与液压》
北大核心
2023年第5期122-127,共6页
Machine Tool & Hydraulics
基金
四川省科技厅高新技术重点研发项目(2021YFG0056)
宜宾市职业技术学院校级项目(ybzysc20-03)
四川省科技厅高新技术重点研发项目(2022YFG0012)
大学生创新基金项目(D10501177,B50104436)。
