玻璃表面微颗粒的激光清洗研究(特邀)

Research on laser cleaning of micro-particles on glass surface(invited)

针对玻璃表面微颗粒的污染问题,文中研究了脉冲激光对颗粒污染物的清洗阈值和清洗效果。通过颗粒吸附和形变模型计算石英玻璃表面与颗粒间的吸附力,分析热应力与激光能量密度的关系。通过吸附力和热应力的对比分析得到颗粒污染物的清洗条件和理论阈值。实验对比石英玻璃表面颗粒的正面入射和反面入射的清洗效果,研究功率密度、扫描速度和清洗次数等参数对清洗率的影响。结果表明,大颗粒污染物的反面清洗可以完全去除,正面清洗小颗粒污染物的效果较好。单因素和三因素研究表明激光功率密度对清洗率的影响比扫描速度大,激光清洗次数对清洗率几乎没有影响。

For the contamination problem of micro-particles on glass surface, the cleaning threshold of pulsed laser and its cleaning effect on particle contaminants are studied in this paper. The particle adsorption and deformation model was used to calculate the particle adsorption force. The relationship between thermal stress and laser energy density was analyzed, and the cleaning conditions and theoretical thresholds for particle contaminants were obtained. The cleaning effect of forward irradiation and back irradiation of particles on glass surface were compared in experiments, and the effect of parameters such as power density, scanning speed and cleaning times on the cleaning rate were studied. The results show that the back irradiation cleaning of large particles can be removed, and forward irradiation cleaning of small particles is more effective. The experiments of single-factor and three-factor show that the laser power density has a greater impact on the cleaning rate than the scanning speed, and the laser cleaning times have little impact.a greater impact on the cleaning rate than the scanning speed, and the laser cleaning times have little impact.