变面积型圆柱面电容式倾角传感器的输出特性

Output Characteristics of Variable Area Cylindrical Capacitive Inclination Sensor

为研究考虑边缘效应的变面积型圆柱面电容式倾角传感器的输出特性,将保角变换法、格林函数法和计算机数值模拟相结合,讨论变面积型圆柱面电容式倾角传感器的电场,给出电容量的表达式,绘制出传感器电容量随倾角的变化曲线,分析影响该传感器线性度及灵敏度的因素,并指出改善该传感器输出特性的途径。数值模拟结果表明,在传感器的外极板所对应的圆心角小于内极板的情况下,减小两极板间距,可使其同时具有较高的线性度和灵敏度。由于研究计及了该传感器极板的横向边缘效应,故所得结果具有较高的精确度。

To study the output characteristics of the variable area cylindrical capacitive inclination sensor considering the edge effect,this paper combines the conformal transformation method,Green’s function method and computer numerical simulation to discuss the electric field of the variable area cylindrical capacitive inclination sensor,give the expression of its capacitance,draw the variation curve of the sensor capacitance with the inclination,and analyze the factors affecting the linearity and sensitivity of the sensor.It points out how to improve the output characteristics of the sensor.The numerical simulation results show that when the center angle of the outer plate of the sensor is smaller than that of the inner plate,reducing the distance between the two plates can increase sensor linearity and sensitivity at the same time.Because the lateral edge effect of the sensor plate is considered in this paper,the results obtained have high accuracy.