摘要
A quadrature phase-shift keying(QPSK)coherent photodetector chip consisting of a 4×4 multimode interference 90°optical hybrid and a four-channel evanescent photodetector array is designed and fabricated with its photo-response in the L-band characterized.The metal organic chemical vapor deposition regrowth method is adopted to realize active–passive monolithic integration.The chip exhibits a low dark current below 100 nA for each photodetector in the array,a low excess loss of 0.85 dB,a common mode ratio rejection better than 13.6 dB,and a phase deviation within±10°over the 40 nm wavelength span.
作者
叶焓
韩勤
王帅
肖峰
肖帆
褚艺渺
耿立妍
Han Ye;Qin Han;Shuai Wang;Feng Xiao;Fan Xiao;Yimiao Chu;Liyan Geng(State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;College of Materials Science and Optoelectronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)
基金
supported by the National Key Research and Development Program of China(No.2020YFB1805701)
the National Natural Foundation of China(Nos.61934003,61635010,and 61674136)
the Beijing Natural Science Foundation(No.4194093).
