太阳能级多晶硅生产工艺研究现状

Research status of solar-grade polysilicon production technology

介绍了改良西门子工艺、强化FBR联合碳化物工艺、混合工艺、新硅烷工艺和卤化硅的热分解或歧化工艺,并分析了每种工艺的流程及特点。

This article discusses the Siemens process,intensified FBR union carbide process,hybrid process,the new silane process and silicon halide thermal decomposition or disproportionation process,and analyzes the flow and characteristics of each process.