电子特气的合成与纯化技术研究进展

Advances in Synthesis and Purification of Electronic Special Gas

电子特气是电子工业中不可或缺的基础性支撑材料,被誉为电子行业的“血液”和“粮食”,电子特气通常对纯度要求高,一般在5N级,部分品种的纯度要求6N级甚至更高。因此,电子特气的关键制备技术不仅仅是合成技术,还包括纯化技术。对电子特气的合成与纯化技术进行了归类总结,合成技术包括电解法、化学法和电解-化学法,纯化技术包括吸附法、精馏法、吸收法、膜分离法等,具有一定的参考价值和指导意义。

Electronic special gas is an indispensable basic support material in the electronics industry, known as the "blood" and "food" of the electronics industry. Electronic special gas usually has a high purity requirement, which is generally 5N, and the purity of some varieties is 6N or even higher. Therefore, the key preparation technology of electronic special gas is not only the synthesis technology, but also the purification technology. In this paper, the synthesis and purification technologies of electronic special gas are classified and summarized. The synthesis technologies include electrolysis, chemical method and electrolytic-chemical method, and the purification technologies include adsorption method, distillation method, absorption method and membrane separation method, etc., which has certain reference value and guiding significance.