一种MEMS陀螺仪信号调理电路线性度的测试方法

A Test Method for Measuring the Linearity of MEMS Gyroscope Conditioning IC

主要针对与电容检测式微机电系统(Micro-Electro-Mechanical System, MEMS)陀螺仪敏感结构适配的信号调理电路,基于其所构成的MEMS陀螺仪测控系统工作原理,建立陀螺仪信号处理的数学模型,并根据陀螺仪系统线性度测试方法,提出一种可等效产生电路电容增益的信号调理电路线性度测试方法,该方法可用于实验室环境下陀螺仪信号调理电路线性度的评估。

In this paper,based on the work principle of MEMS gyroscope system and the test method of its scale factor nonlinearity at the system level,the mathematic model of signal processing in MEMS gyroscope system is established.A test method,which can generate the same capacitance gain to the circuit without any capacitive sensors,is proposed for measuring the linearity of MEMS gyroscope conditioning IC adapted to silicon capacitive sensors.This method can be used to evaluate the linearity of MEMS gyroscope conditioning IC in laboratory environment.