钛合金压阻式压力传感器玻璃烧结基座的制备及工艺研究

Research on Preparation and Process of Glass Sintering Base of Titanium Alloy Pressure Sensor

钛合金具有比强度高、耐高温、耐腐蚀等优良特性,以其作为外壳的传感器在恶劣环境下的工作能力远优于不锈钢作为外壳的传感器。基于钛合金的上述特性,首先系统地研究了钛合金压阻式压力传感器玻璃烧结基座的制备工艺,针对制备过程中表面处理及镀金后烧结基座存在的气密性差、绝缘电阻不良等问题进行了分析与讨论,并给出了解决方案,最终生产出了满足客户要求的产品。

The titanium alloy had excellent characteristics such as high specific strength,high temperature resistance,high corrosion resistance and so on.The working ability of the sensor with titanium alloy as shell was much better than that of the sensor with stainless steel shell in harsh environment.Based on the above characteristics of titanium alloy,firstly,the preparation process of the glass sintering base of titanium alloy piezoresistive pressure sensor was systematically studied,and the problems of poor air tightness and poor insulation resistance of the sintered base after surface treatment and gold plating in the preparation process were analyzed and discussed.Then,the solutions were given.Finally,produced products met customer requirements.