Ir/HfO_(2)复合涂层的制备及性能研究

Preparation and properties of Ir/HfO_(2)composite coatings

利用化学气相沉积(CVD)技术制备了HfO_(2)涂层和Ir/HfO_(2)复合涂层,采用金相显微镜(OM)、扫描电镜(SEM)、电子探针(EPMA)对涂层的性能进行分析。结果表明:在沉积Ir时,沉积室升温速率≤10℃/min时,制备出的Ir/HfO_(2)复合涂层经真空高温热处理后可获得表面质量良好的Ir层,且Ir层纯度达到99.77%;真空热处理有益于提高Ir/HfO_(2)复合涂层之间的结合程度,且热处理温度越高,结合效果越好;表面制备有HfO_(2)涂层的Ir棒在1980℃氧化10 h的条件下,HfO_(2)涂层对Ir的保护效果显著,可将Ir的氧化深度由毫米级降至数十微米。

HfO_(2)coatings and Ir/HfO_(2)composite coatings are prepared by chemical vapor deposition(CVD).The properties of the coatings are analyzed by optical microscopy(OM),scanning electron microscopy(SEM)and electron probe microanalysis(EPMA).The results show that a good surface quality on Ir/HfO_(2)composite coating can still be maintained after heat treatment when the heating rate of the deposition chamber is less than 10℃/min,and the purity of Ir layer can reach 99.77%.Vacuum heat treatment is beneficial to improve the bonding degree between Ir/HfO_(2)composite coatings,and the bonding effect increases with the rise of heat treatment temperature.When Ir rod with HfO_(2)coating on the surface was oxidized at 1980°C for 10 h,HfO_(2)coating had a remarkable protective effect on Ir,and the oxidation depth of Ir was reduced from millimeter level to tens of microns.