基于波长调制系统的高灵敏度碳化硅光学MEMS加速度计

High-sensitivity silicon carbide optical MEMS accelerometer based on wavelength modulation system

本文报道了一种基于双模波长调制的高频碳化硅(Silicon carbide,SiC)传感器及其在并光学微机电系统(Microelectromechanical systems,MEMS)中应用。基于碳化硅材料属性及双模分析,设计了一种适用于高频场的光学MEMS传感器,并利用ANSYS有限元分析(Finite element analysis,FEA)方法和严格耦合波分析(Rigorous coupled wave analysis,RCWA)方法,将其与其他高频传感器进行性能比较。结果表明,该光学传感器在整个操作测量范围内可提供2.2477(Δλ/Δa)的光学灵敏度、0.155 nm/g的机械灵敏度和几乎为零的交叉轴灵敏度,且第一谐振频率为40.035 kHz,线性测量范围为±129.03 g,传感系统灵敏度(Δλ/Δa)为0.3484 nm/g,工作带宽为35 kHz。

This paper reports a high-frequency silicon carbide(SiC)sensor that relies on dual-mode wavelength modulation and its application to optical microelectromechanical systems(MEMS).Based on the properties of as well as SiC and the characteristics of dual-mode analysis,an optical MEMS sensor suitable for a high-frequency field is designed.In addition,the finite element analysis(FEA)method with ANSYS and the rigorous coupled wave analysis(RCWA)method are used.A comparison with other high-frequency sensors shows that the proposed sensor displays advantages with respect to properties such as a wide measurement range,high sensitivity,and almost zero cross-axis sensitivity.The proposed optical sensor provides an optical sensitivity(Δλ/Δa)of 2.2477,a mechanical sensitivity of 0.155 nm/g and an almost zero cross-axis sensitivity in the entire operation measurement range.The first resonance frequency is 40.035 kHz,the linear measurement range is±129.03 g,the sensitivity of the sensing system(Δλ/Δa)is 0.3484 nm/g,and the working bandwidth is 35 kHz.