空间激光通信光学系统中近红外激光高反射膜的研制

Development of near-infrared laser high reflective film for space laser communication optical system

针对空间激光通信光学系统在800±5 nm和1550±5 nm收发效率大于98%的要求,采用Essential Macleod膜系设计软件结合物理气相沉积设备,在微晶玻璃上完成了空间激光通信光学系统中近红外反射膜的研制。提出行星夹具补偿挡板的修正方法,可将口径300 mm基片的薄膜厚度均匀性提高至99%。利用Lamda1050光谱仪测试了反射镜的光谱曲线,结果表明所研制的膜层在800±5 nm和1550±5 nm处反射率均值分别为99.3867%和99.1717%,满足技术指标要求。对实验样品开展了面形、附着力和高低温等环境适应性试验,试验结果满足空间激光通信光学系统使用要求。

Aiming at the requirements that the transmit-receiving efficiency of space laser communication optical system is greater than 98%at 800±5 nm and 1550±5 nm,the development of near-infrared reflective film in space laser communication optical system is completed on glass-ceramic using Essential Macleod film system design software combined with physical vapor deposition equipment.A modification method of planetary fixture compensation baffle is proposed to improve the film thickness uniformity to 300 mm diameter substrate.The spectral curves of the mirror are measured by Lamda1050 spectrometer;the results show that the average reflectance of the developed film at 800±5 nm and 1550±5 nm is 99.3867%and 99.1717%,respectively,which meets the technical requirements.The experimental samples are tested for surface shape,adhesion and high and low temperature adaptability and the results meet the requirements of space laser communication optical system.