摘要
微/纳尺度压力传感器可以检测来自外部环境的压力,分析所施加力的位置,大小和方向.这种压力传感器在电子屏幕、电子皮肤、运动监测、人工触觉系统等多个领域都有很高的应用需求.本文组装了一种可实现二维映射,基于图案化铌酸钾钠纳米棒阵列的压力传感器矩阵.水热合成的正交相铌酸钾钠纳米棒具有优异的柔性和弹性,同时具有较高的压电性能.因此在组装的压力传感器矩阵中,单个单元尺寸低至200μm,灵敏度可达0.20 V N^(-1),检测限低至20 g,且器件的稳定性高.空间分离的传感器单元能有效避免交叉干扰,使器件能准确地实现自驱动压力成像,精确地分析外部压力刺激.
Micro/nano-scaled pressure sensors that can detect the pressure from an external environment to analyze the location,quantity,and configuration of the applied force,are in high demand for electronic screen,electronic skin,motion monitoring,artificial tactile system and several other fields.In this study,a pressure sensor matrix that can realize the two-dimensional pressure mapping is successfully developed by utilizing the patterned piezoelectric(K,Na)NbO_(3)(KNN)nanorod arrays.The as-synthesized orthorhombic KNN nanorods exhibit outstanding mechanical flexibility and elasticity,together with high piezoelectric performance,which render outstanding piezoelectric response towards mechanical stimulation by external forces.A high sensitivity of single unit up to 0.20 V N^(-1)is achieved,with a detection limit down to 20 g and excellent stability,thanks to the highly flexible and elastic properties of the sensitive KNN nanorods.The micro sensor matrix with each unit separated spatially facilitates the detection of the pressure distribution in the effective areas with no cross-interference,which can accurately realize a selfpowered pressure mapping and precisely analyze the mechanical stimulations.
作者
姜蕾
卢梦瑞
杨飘云
范怡静
黄浩
熊娟
王钊
顾豪爽
John Wang
Lei Jiang;Mengrui Lu;Piaoyun Yang;Yijing Fan;Hao Huang;Juan Xiong;Zhao Wang;Haoshuang Gu;John Wang(Hubei Key Laboratory of Ferro-&Piezo-electric Materials and Devices,Faculty of Physics and Electronic Science,Hubei University,Wuhan 430062,China;Department of Materials Science and Engineering,National University of Singapore,Singapore 117574,Singapore;College of Physics and Electromechanical Engineering,Hubei University of Education,Wuhan 430205,China;Key Laboratory of Wireless Sensor Network&Communication,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)
基金
financially supported by the National Natural Science Foundation of China(NSFC,52072115,51972102,and U21A20500)
Wang J acknowledges the support by A*STAR,under RIE2020 AME Individual Research Grant(IRG)(A20E5c0086),for the research conducted at the National University of Singapore
supported in part by a grant from the Key Laboratory of Wireless Sensor Network&Communication,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences(20190909)。
