阴极多弧离子镀CrAlN涂层表面质量优化研究

Optimization of Surface Quality of CrAlN Coatings Fabricated Using Cathode Multi⁃Arc Ion Plating

针对高速加工中冲压模具的磨损问题,常使用阴极多弧离子镀改善表面性能,阴极多弧离子镀涂层表面质量是影响冲压模具寿命的主要因素之一。采用正交试验研究了直流偏压、氮气流量和弧源电流对CrAlN涂层表面质量的影响,采用极差法和方差法分析了直流偏压、氮气流量和弧源电流对CrAlN涂层表面质量影响的显著性。结果表明:氮气流量对CrAlN涂层表面质量影响最为显著,直流偏压也对CrAlN涂层表面大颗粒数量有较为显著的影响。当直流偏压为160 V,氮气流量为1 600 mL/min,弧源电流为120 A时,涂层表面大颗粒数量最少,涂层表面质量最好,每10 000μm^(2)里有42.5个大颗粒。

To solve the wear problem of stamping dies in high⁃speed machining,cathodic multi⁃arc ion plating is often used to improve surface properties,and the surface quality of cathode multi⁃arc ion plated coating is one of main factors affecting the life of stamping dies.In this paper,the effects of the DC bias voltage,flow rate of nitrogen and arc current on the surface quality of CrAlN coating were studied by the orthogonal experiments.The significance of the effects of DC bias voltage,flow rate of nitrogen and arc current on the surface quality of the CrAlN coating was analyzed by the extreme⁃range method and variance method.Results showed that the surface quality of the CrAlN coating was affected most significantly by the flow rate of nitrogen,and the DC bias voltage also influenced the number of large particles on the surface of the CrAlN coating.When the DC bias voltage was 160 V,the nitrogen flow rate was 1600 mL/min,and the arc source current was 120 A,the as⁃prepared coating possessed the minimum number of large particles on the surface(42.5 per 10,000μm^(2))and the optimal surface quality.