电子信息产业废水一类污染物管控研究

Research on Management and Control of First Class Water Pollutants in Electronic Information Industry

本文聚焦电子信息产业链中典型行业,包括电子专用材料制造、集成电路制造、半导体分立器件制造、光电子和显示器件制造和封装测试行业,汇总统计电子信息产业典型行业中产生含一类污染物废水的主要环节包括拉晶、切磨抛、刻蚀和清洗,排放种类主要包括砷、镍、镉、银、锡等。结合上海市部分企业废水一类污染物管控现状调研,本文建议电子信息企业遵循尽量削减,避免稀释排放的总体思路,结合工艺原理分析以及实测结果,对不同浓度含一类污染物废水分别采取最有效的治理手段。

This research focuses on typical industries in the electronic information industry chain,which includes,the electronic special materials manufacturing industry,integrated circuit manufacturing industry,semiconductor device manufacturing industry,optoelectronics,and display device manufacturing industry,IC assembly and test industries,and summarizes the main process sections that produce the“first-class wastewater pollutants”including crystal growth,wafer slicing,grinding and polishing,wafer etching and wafer cleaning.The types of“first-class wastewater pollutants”that are discharged into wastewater include arsenic,nickel,cadmium,silver,tin,etc.Combining with the investigation of the status quo of wastewater management methodologies of some electronic enterprises in Shanghai,this paper suggests that electronic information enterprises should follow the principle of reducing discharge and avoiding dilution discharge,use the most effective treatment methods to treat effluent with different concentrations of“first-class wastewater pollutants”,according to theoretical analysis and concentration monitoring results.