纳米光栅三轴MOEMS陀螺设计与仿真分析

Design and simulation analysis of nano-grating tri-axis MOEMS gyroscope

设计了一种基于纳米光栅泰伯效应的三轴微光机电系统(MOEMS)陀螺,详细阐述了纳米光栅三轴MOEMS陀螺的工作原理,建立了陀螺结构模型并分析其灵敏度。仿真结果表明:x,y,z轴陀螺结构灵敏度分别为42.76,43.63,76.79 nm/((°)·s^(-1))。对双层光栅的衍射灵敏度仿真分析,得到双层光栅面内与离面模式下的衍射灵敏度分别为297.1,159.7 V/mm。最后,结合结构灵敏度与衍射灵敏度得到x,y,z轴陀螺的灵敏度大小分别为6.83,6.97,22.81 mV/((°)·s^(-1))。

A tri-axis micro-optical electro-mechanical system(MOEMS)gyroscope based on Talbot effect of nano-gratings is designed,working principle of nano-grating tri-axis MOEMS gyroscope is described in details,and structural model is built up and sensitivity is analyzed.The simulation results show that the sensitivities of x,y and z axis structure are 42.76,43.63 and 76.79 nm/((°)·s^(-1)),respectively.The in-plane/out-of-plane diffraction sensitivity of the double-layer grating are 297.1,159.7 V/mm,obtained by simulation and analysis.Finally,combining with the structural sensitivity and diffraction sensitivity,the obtained sensitivity of x,y and z axis are 6.83,6.97 and 22.81 mV/((°)·s^(-1))respectively.