摘要
介绍了等离子的产生机理及等离子清洗技术的原理;给出一种等离子清洗机的腔体,其特点是工艺气体从左向右水平流动,每个带有小孔的腔体极板可以灵活配置成悬浮极、阳极和阴极;选取合适的工艺条件后,获得了良好的清洗效果。
The mechanism of plasma production and the principle of plasma cleaning technology are introduced.A kind of chamber of plasma cleaning machine is presented,which is characterized by the horizontal flow of process gas from left to right.Each chamber plate with small holes can be flexibly configured as suspension electrode,anode and cathode.After selecting the appropriate process conditions,good cleaning effects could be obtained.
作者
庞克俭
PANG Kejian(The 13^(th)Research Institute of CETC,Shijiazhuang 050051,China)
出处
《电子工业专用设备》
2023年第2期10-12,34,共4页
Equipment for Electronic Products Manufacturing
关键词
等离子体
腔体
清洗
极板
Plasma
Chamber
Cleaning
Electrode-plate
