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标记定位算法的研究与开发

Research and Development of Marker Location Algorithm
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摘要 阐述常用标记定位算法有基于边缘特征的模板匹配算法(Shape Match,SM)、基于灰度信息的模板匹配算法(Gray Match, GM)。SM和GM算法,在标记无明显变形时,能适应大部分工况要求。但当标记存在明显变形时,已有SM和GM算法并不适用,计算出的标记位置并非其形心,需要开发一种能确定变形标记形心的定位算法。探讨采用连通域法定位标记中心,对标记进行二值化处理,提取标记边缘点,用连通域法识别出标记,并采用格林公式计算标记的形心。该算法能有效定位标记变形时的形心。 This paper expounds that the commonly used marker location algorithms include the template matching algorithm based on edge features(Shape Match,SM)and the template matching algorithm based on gray information(Gray Match,GM).SM and GM algorithms can adapt to most working conditions when there is no obvious deformation of the mark.However,when the mark has obvious deformation,the existing SM and GM algorithms are not applicable,and the calculated mark position is not its centroid,so it is necessary to develop a positioning algorithm that can determine the centroid of the deformation mark.It discusses using the connected domain method to locate the mark center,binarize the mark,extract the mark edge points,identify the mark using the connected domain method,and calculate the centroid of the mark using Green's formula.The algorithm can effectively locate the centroid of the mark when it is deformed.
作者 肖蓉 XIAO Rong(Shanghai Microelectronics Equipment(Group)Co.,Ltd.,Shanghai 201203,China)
出处 《集成电路应用》 2023年第3期28-30,共3页 Application of IC
关键词 标记变形定位 模板匹配 连通域 格林公式 marker deformation location template matching connected domain Green's formula
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