五维位姿监测的差动共焦曲率半径测量

Differential confocal radius of curvature measurement method for five-dimensional position monitoring

为提高球面透镜曲率半径的测量精度,提出基于五维位姿监测调整的差动共焦曲率半径高精度测量方法。通过驱动被测样品回转,在探测器上监测被测件的共焦点轨迹,测量被测件球心点与测量光轴之间的偏心误差,结合位姿调整系统对偏心误差进行自动补偿,确保测量过程中被测件球心与测量光轴重合,消除被测样品球心离轴引入的测量余弦误差,进而消除每次装调的样品位姿误差对测量精度的影响。理论计算和初步实验表明:该方法对曲率半径的相对重复测量精度(RMS)可达到3.2×10^(-6)。该方法显著提升了曲率半径的重复测量精度,为曲率半径的精密测量提供了有效途径。同时,该方法还为透镜中心偏、焦距、厚度、镜组间隔等多种参数的高精度测量提供了有效方法。

To improve the measurement accuracy of the radius of curvature,a high-precision measurement method of a differential confocal radius of curvature based on a five-dimensional(5D)pose monitoring adjustment was proposed.On the basis of the differential confocal curvature radius measurement system,this method introduces a 5D position monitoring and adjustment structure by driving the measured part rotation on the detector to monitor the confocal trajectory.In addition,it enables measurement of the eccentric error of the spherical center point of the measured part and the measured optical axis,combined with two-dimensional(2D)translation and 2D angle adjustment to automatically compensate for the eccentric error.Further,it aims to ensure that the measured sample spherical center and the measured optical axis are in good agreement during the measurement process,eliminate the measurement cosine error caused by the deviation of the spherical center of the measured sample,and eliminate the influence of the sample posture error on the measurement accuracy of each installation.Based on the results obtained,repeatability measurements are significantly improved with the proposed method.Theoretical simulation and preliminary experimental results show that the repeatability of the proposed method for measuring the radius of curvature can reach 3.2×10^(-6).This method is shown to be an effective way of obtaining a precise measurement of the radius of curvature.At the same time,this method can also be extended to the measurement of the lens center deviation,focal length,thickness,lens group interval,and other parameters to improve the measurement repeatability of lens parameters.