摘要
为满足MEMS传感器高精度和高灵敏度的应用需求,适应复杂工况环境,减少外部环境对传感器造成的影响,设计了一种力-热隔离装置.该装置采用悬架式结构设计,中心安装MEMS传感器,四周通过悬架梁与装置基座相连.依照传感器对于高频冲击载荷和温度较为敏感的特点,悬架梁采用低导热率、低弹性模量的聚合物材料,能够起到隔离高频冲击应力波和外部高温的作用;同时还可以还原外界低频加速度输入,保证MEMS传感器正常工作且提高了环境适应性.通过算例利用有限元仿真方法分析了力-热环境影响下隔离装置的温度场分布、结构动态特性和动力学响应,并对比了不同聚合物材料和关键悬架结构参数的影响效果,从可加工性、隔热、隔振和悬架强度方面对隔离装置进行了综合优化选取.本设计和分析方法可为MEMS传感器的环境适应性设计提供参考,拓宽了其在军事武器装备,航天航空领域的应用范围.
For the application requirements of MEMS sensor with high precision and sensitivity,a MEMS thermal and vibration isolator is designed to adapt to complex working conditions and reduce the influence of external environment on the sensor.MEMS sensor installed in the center of the isolator and connected to the base through the suspension beam all around.According to the characteristics of being sensitive to high frequency impact and temperature,the isolator is able to block external shock waves and thermal via suspension polymer beam structure due to the low thermal conductivity and Young modulus of polymer.More than this,external low-frequency acceleration can be fed back.The working performance of MEMS sensor is stable and the environmental adaptability can also be improved.Finite element simulations have been carried out to indicate the temperature,frequency and dynamic responses under the influence of thermal-mechanical,in addition,the simulation results are compared with different polymer materials and structural parameters.At last,the optimization scheme is adopted from processing,heat insulation,vibration isolation and structural strength.This design can provide a reference for environmental adaptability of MEMS and expand its application scope in military weapons and equipment,aerospace and aviation fields.
作者
阎彬
雷雨
周黎阳
王龙
YAN Bin;LEI Yu;ZHOU Liyang;WANG Long(Xi’an Microelectronics Technology Institute,Xi’an 710065,China)
出处
《微电子学与计算机》
2023年第5期47-55,共9页
Microelectronics & Computer
基金
装备预研航天科技联合基金(5141B062701)。
关键词
MEMS传感器
聚合物
隔离装置
高频冲击
悬架式
环境适应性
MEMS sensor
Polymer
Isolator
High-frequency shock
Suspension structure
Environmental adaptability