氮氩比对多弧离子镀TiAlSiN薄膜形貌和性能的影响

Effect of Nitrogen/Argon Ratio on Microstructure and Properties of TiAlSiN Film Prepared by Multi-Arc Ion Plating

为了改善模具钢表面质量,采用多弧离子镀技术在H13模具钢表面沉积TiAlSiN薄膜,采用扫描电镜(SEM)、X射线衍射(XRD)等方法研究了不同氮氩比对薄膜表面形貌、硬度、结合力、耐腐蚀性能和抗氧化性的影响。结果表明:当氮氩比为8∶2时,薄膜表面颗粒堆积较少,光滑平整,致密性好,此时薄膜膜基结合力达到最大值20.4 N。随着氮氩比的升高,样品经过高温氧化后,增重百分比呈下降趋势,当氮氩比为8∶2时,增重百分比最低,具有最佳的高温抗氧化性能;并且此时薄膜的自腐蚀电流密度达到最小,为3.147×10^(-5)A/cm^(2),薄膜的耐腐蚀性能最优。

In order to improve the surface quality of die steel,TiAlSiN films were deposited on the surface of H13 die steel by multi-arc ion plating technology,and the effects of different nitrogen/argon ratios on the surface morphology,hardness,adhesion,corrosion resistance and oxidation resistance of the film were studied by means of scanning electron microscope,X-ray diffraction(XRD)and other methods.Results showed that when the ratio of nitrogen to argon was 8:2,the film had less particle accumulation on the surface,the surface was smooth with high density,the bonding force between the film and the substrate also reached the maximum value of 20.4 N.With the increase of nitrogen-argon ratio,the weight gain percentage of the sample after high-temperature oxidation showed a downward trend.When the nitrogen-argon ratio was 8:2,the weight gain percentage was the lowest,and the sample had the best high-temperature oxidation resistance.And under this condition,the self-corrosion current density of the film reached the minimum value of 3.147x10^(-5)A/cm^(2),and the corrosion resistance of the film was the best.