Silicon waveguide-based single cavity Fano resonance temperature sensor

A compact Fano resonant temperature sensor composed of a micro-ring resonator(MRR)coupled double-T-shaped waveguide is developed.The coupling gap and coefficient of the device are optimized by the finite difference time domain(FDTD)method.The maximum slope ratio(SR)of the MRR-coupled single-T-shaped waveguide is-2.13 d B/nm.The SR of the double-T-shaped waveguide is-49.69 d B/nm which is 23 times that of the single-T-shaped waveguide.The simulation results show that the temperature sensitivity of optical intensity decreases with increasing temperature in the range from 303.6 K to 343.8 K.The wavelength-temperature sensitivity of the double-T-shaped waveguide microring is 76.5 pm/K.After introducing the double-T-shaped waveguide structure,the device’s performance is greatly improved,and the double-T-shaped waveguide has a good application prospect as a temperature sensor.